SPIE. Photonics West 01/2024
Towards process control by detecting acoustic emissions during ultrashort pulsed laser ablation of multilayer materials
Authors: Contents:- Ultra-short-pulsed laser ablation of thin multilayer materials can be monitored using XARION’s Eta450 Ultra optical microphone
- It is possible to monitor the material transition between polymer and copper during laser ablation by observing a broad acoustic frequency spectrum between 100 kHz and 2 MHz in air, and by detecting a sudden change in acoustic energy
- A direct correlation was found between increased detected acoustic energy and higher ablation rate