SPIE. Photonics West 01/2024

Towards process control by detecting acoustic emissions during ultrashort pulsed laser ablation of multilayer materials


C. Lutz, R. Sommerhuber, M. Kettner, C. Esen, R. Hellmann

  • Ultra-short-pulsed laser ablation of thin multilayer materials can be monitored using XARION’s Eta450 Ultra optical microphone
  • It is possible to monitor the material transition between polymer and copper during laser ablation by observing a broad acoustic frequency spectrum between 100 kHz and 2 MHz in air, and by detecting a sudden change in acoustic energy
  • A direct correlation was found between increased detected acoustic energy and higher ablation rate
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